CHN
Device Fabrication

Thermal evaporator

Source:Institute of LQM      Author:吴沁柯    Published Date:2026-03-12    Views:

  • Model (EB-500) and company (SKY Technology Development Co.,Ltd.), Location(Cleanroom)

    Superuser(Jinxia Xu),contacts (13476823697/wechat ID: hbutxujx)

  • Brief description

  High Vacuum Thermal Evaporation Film Deposition System is used for preparing: low- melting-point metals such as Au, Ag, Cu, etc, and is able of depositing single-layer/multi-layer films.The equipment is simple and easy to control, with a large coating area.

  • Specifications: 

    -vacuum degree10-5 Pa,

    -Substrate 6 inchs

    -6pockets x 20 cc (about 20 ml), 3 evaporation sources

    -Heating power supplies: 6V 200A, 3 sets

    -Deposition Film options: Au, Ag, Cu, etc...



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