Source:Institute of LQM Author:吴沁柯 Published Date:2026-03-12 Views:
Model (EB-500) and company (SKY Technology Development Co.,Ltd.), Location(Cleanroom)
Superuser(Jinxia Xu),contacts (13476823697/wechat ID: hbutxujx)
Brief description:
High Vacuum Thermal Evaporation Film Deposition System is used for preparing: low- melting-point metals such as Au, Ag, Cu, etc, and is able of depositing single-layer/multi-layer films.The equipment is simple and easy to control, with a large coating area.
Specifications:
-vacuum degree10-5 Pa,
-Substrate 6 inchs
-6pockets x 20 cc (about 20 ml), 3 evaporation sources
-Heating power supplies: 6V 200A, 3 sets
-Deposition Film options: Au, Ag, Cu, etc...
Next:E-beam evaporator
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