Mask aligner

• Model（URE-2000/34AL）and company (中科院光电技术研究所), Location (Cleanroom)

    Superuser (Jingjing Lu/Zhuo Peng), Contacts (15377533309/wechat ID: miaomer_777、18672798545/wechat ID: pzpzpz1993)

• Brief description: 

    The mask aligner URE-2000/34AL is a proximity contact lithography machine, which is essential in research fields such as materials science and electronic device fabrication. It is primarily used for manufacturing small-scale integrated circuits, semiconductor devices, infrared devices, surface acoustic wave devices, micro-electromechanical systems (MEMS), microfluidic systems, and more. It features user-friendly operation, stable performance, and high reliability.

• Specifications:

    -wavelength：365 nm；UV- LED light source

    -Illuminance inhomogeneity up to 2.5% (Φ150mm)

    -Resolution up to 0.8 ~ 1μm；

    -Alignment down to 0.8 ~ 1μm ；

    -Stand-alone system for wafer sizes up to 150 mm/6’’