Pattern generator (laser writing）

• Model (µMLA ) and company (Heidelberg), Location (Cleanroom)

    Superuser (Xingjuan Song), contacts (15527359929/wechat ID: juan921217826)

• Brief description: 

It is a versatile tabletop direct laser lithography system that eliminates the need for physical photomasks, enabling highly efficient and precise micro-patterning for research and development.

• Specifications:

    - Maximum substrate size:155 mm x 155 mm (1 kV )

    - Minimum substrate size:5 x 5 mm2

    -Maximum write area:150 x 150 mm2

    -Substrate thickness:0.1 to 15 mm

    -Minimum Feature Size: 1 μm

    -Minimum Lines and Spaces：1.5μm

    -Overlay accuracy@50 x 50mm2:1000nm