Scanning transmission electron microscopy (STEM)

• Model(JEM-ARM300F2) and company (JEOLLtd.)

• Brief description: STEM is a powerful technique for atomic-resolution imaging and composition analysis. It operates by focusing a fine electron beam into a small probe that is scanned across an electron-transparent specimen, while various transmitted signals are collected simultaneously to form images or analytical maps. When combined with EDX or EELS, it provides comprehensive characterization of elemental and electronic structure at the nanoscale.

• Specifications

- STEM resolution: 53 pm (300 kV)

- Double spherical-aberration corrected

- Maximum specimen tilt angle (X/Y)：X=±30º；Y=±27º

- STEM detectors: HAADF, BF, SAAF

- EDS analyze range of elements: Be4-U92

- EELS: energy resolution ≤ 0.3 eV, elemental mapping

- FIB: ion (secondary electron) image resolution 4.0 nm at 30 kV (1.2 nm at 15 kV)