Field Emission Scanning Electron Microscope（FESEM）

• Model (JSM-IT810) and company (JEOL), Location (Structural Characterization Room 1)

    Superuser (Xiang Xing), contacts (18040516270/wechat ID: yiyunjin16)

• Brief description: It is mainly used for electron microanalysis of various materials, such as metals, nonmetals, nanomaterials and semiconductor materials etc. It can obtain ultra-high resolution SEI/BEI and EDS/EBSD analysis of the samples under high vacuum conditions

• Specifications

    - Secondary electron image resolution: ≤0.6 nm (15 kV)；≤1.1 nm (1 kV )

    - Resolution during analysis： ≤3.0 nm (15 kV, 10 mm WD, 5 nA)

    - Probe Voltage：0.01 to 30 kV

    - Magnification: ×10 to 2,000,000

    - Loadable specimen size: ≥170 mm (dia.) × 45 mm (H) (5 mm WD)

    - EDS: an effective area of 60mm2 for Detector

    - EBSD: online parsing has a maximum calibration speed of 600pps, and the pattern resolution can still be maintained at 312 * 256