6 probe station

• Model ( HCP-O-2 ) and company (Tianheng), Location (Device Room 5)

 Superuser (Xingjuan Song), contacts (15527359929/wechat ID: juan921217826)

• Brief description: 

   6 probe station measures the electrical properties of materials and devices under controlled conditions. It uses precise manipulators to land up to six probes on a sample's surface inside a vacuum chamber. Its primary use is for I-V/C-V characterization across a wide temperature range, essential for semiconductor and materials research.

• Specifications:    

    -Ultimate Vacuum: ≤ 1 x 10⁻⁷ Torr, achieved by a two-stage turbomolecular pump system.

    -Operating Temperature: 80K to 500K, with high-precision control (±0.5K stability, 0.1K resolution).

    -Vibration Isolation: Floor-standing system with ≤ 2 µm vertical isolation.

    -Probes: Six DC-to-RF compatible vacuum manipulators with 1 µm positioning accuracy.

    -Sample Stage: Features electrical floating, ground, and back-gating capabilities via triaxial connections.

    -Low-Current Capability: Excellent shielding allows for current measurements with ≤ 10 fA resolution.

    -Measurement Resolution: Current (I): ≤ 10 fA, Capacitance (C): ≤ 10 fF

    -Microscope: High-magnification optics with ≤ 2 µm resolution.

    -Laser Integration: Includes a Thorlabs 4-Channel Laser

    for a multi-wavelength laser source (450,532,633,785, 852, 940,1064, 1310 nm).